High load capacity nanopositioning air bearing linear stages

The AEROLOX 200 series motion systems have been designed to provide friction-free motion and nanopositioning where the payload mass is higher than typically seen in microelectronics applications.

AEROLOX is ideally suited to:

• High precision machinery that require high accuracy and zero friction motion with large masses
• Automation systems where high accuracy of end effectors are needed through combination motions with articulated robotics or parallel kinematic motion devices.
• Advanced imaging systems that employ large scale optical instruments
• Larger scale metrology systems where positioning accuracy and precision motion control is demanded
• Semiconductor and clean room based applications that require no dust particle generation and nanometre levels of position hold stability (noise floor)

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