AEROLOX Series 200

High load capacity nanopositioning air bearing linear stages

The AEROLOX 200 series motion systems have been designed to provide friction-free motion and nanopositioning where the payload mass is higher than typically seen in microelectronics applications.

AEROLOX is ideally suited to:

  • High precision machinery that require high accuracy and zero friction motion with large masses
  • Automation systems where high accuracy of end effectors are needed through combination motions with articulated robotics or parallel kinematic motion devices.
  • Advanced imaging systems that employ large scale optical instruments
  • Larger scale metrology systems where positioning accuracy and precision motion control is demanded
  • Semiconductor and clean room based applications that require no dust particle generation and nanometre levels of position hold stability (noise floor)

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AEROLOX200-brochure-A4_V6

AEROLOX 200 series provides:

  • High Load Capacity (> 100 kg)
  • Nanopositioning
  • Positioning Resolution 1 nm
  • Clean room compatible
  • Robust air bearing design
  • Platform size 180 mm x 350 mm
  • Travel range 100 - 800 mm

Range:

100 mm

200 mm

400 mm

800 mm

Calibrated

+ / - 0.4 µm for LP100

+ / - 0.8 µm for LP200

+ / - 1.6 µm for LP400

+ / - 3.2 µm for LP800

Uncalibrated

+ / - 1 µm for LP100

+ / - 2 µm for LP200

+ / - 3 µm for LP400

+ / - 5 µm for LP800

Over any 25 mm
< 0.15 µm

Over full travel range(2):
1 µm for LP100

1 µm for LP200

2 µm for LP400

3 µm for LP800

(2) Dependent on flatness of mounting

Width : 230 mm

Height: 135 mm

Length: 600  - 1300 mm (travel range dependent)

Mass: 31 - 52 kg (travel range dependent)

Moving mass: 11 kg