High load capacity nanopositioning air bearing linear stages
The AEROLOX 200 series motion systems have been designed to provide friction-free motion and nanopositioning where the payload mass is higher than typically seen in microelectronics applications.
AEROLOX is ideally suited to:
- High precision machinery that require high accuracy and zero friction motion with large masses
- Automation systems where high accuracy of end effectors are needed through combination motions with articulated robotics or parallel kinematic motion devices.
- Advanced imaging systems that employ large scale optical instruments
- Larger scale metrology systems where positioning accuracy and precision motion control is demanded
- Semiconductor and clean room based applications that require no dust particle generation and nanometre levels of position hold stability (noise floor)